Compact Modular Piezo Actuator with Piezo Driver Unit  is designed to add additional  35-50 micron travel range with nanometric resolution and nanoposition control for existing three-axes Newport M-460-XYZ-05 stage.

The piezo actuator fits between the standard stage and existing  Micrometer  as SM or Mitutoyo.

The piezo-actuator itself with Newport Micrometer SM13 is shown on the right.




The Newport M-460-XYZ-05 stage with mounted piezo-actuator and the Newport Micrometer SM13 is shown on the right.

For clarity the installation of one axis of the Newport   M-460-XYZ-05 stage is shown only. The other two axes are mounted similarly.





The Control box (Piezo Driver) provides control of piezo actuators for axes X,Y, Z,  both in the manual mode and the computer (external) mode. The voltage supplied from the Piezo Driver to the piezo actuator is monitored  by the Voltage Monitor.




  • Compact design - only  14 mm diameter.
  • Simple, user-friendly control.


Now you can order this device directly from us:  contact us